具有空间原子层沉积的自对准式双图案化

Self-aligned double patterning with spatial atomic layer deposition

Abstract

Provided are self-aligned double patterning methods including feature trimming. The SADP process is performed in a single batch processing chamber in which the substrate is laterally moved between sections of the processing chamber separated by gas curtains so that each section independently has a process condition.
提供了自对准式双图案化方法,所述方法包括特征修整。在单个批处理腔室中执行SADP工艺,在所述单个批处理腔室中,基板在处理腔室的被气体幕分开的区段之间侧向移动,使得每个区段独立地具有工艺条件。

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